OpticNano Consulting



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OPTICNANO Consulting

126,route de St Donat

  38250 Lans en Vercors-France

Phone +33(0)970 44 82 71

mobile: +33(0)688701450

e-mail: info@opticnano.eu

Skype: opticnano

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earthWelcome  to the  Ellipsometry / Polarimetry site

from

OPTICNANO Consulting EURL

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FS1Pic01The new Band Wavelength Ellipsometer (BWE) excels at measuring the thickness and index of transparent single films, in the thickness range from 0 to 1000 nm. Measurements on semitransparent and absorbing films, and 2 - 3 layer films are also possible.

 

Semiconductor: oxides and nitrides, high/low k dielectrics, amorphous and poly Si, photoresists Optical Coatings: high and low index films a-Si films, organic films (for OLED technology)

Data Storage industry: DLC films.Process R&D: in situ characterization of film deposition, for MBE, CVD,ALD, sputtering,

 Chemistry and Biology: detection of sub-monolayer material adsorption in-line monitoring and controlIndustrial

 Compact, light weight Can be installed without breaking chamber vacuum for

Realtime monitoring and control of film thickness

 

aldcycle

 

Study growth dynamics, nucleation, interfaces Characterize Dep. Rates vs. process parameters in a single 0 50 100 150 200 250 300 350 400 run, without breaking vacuum!.

 

 

 

 

 

    For Europe Quotes and   Documentation ,  information

 

please refer toPAWPRINT  or fill the contact form or mail to

 

logoopticnano

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 infoThis email address is being protected from spambots. You need JavaScript enabled to view it.

 

 


 Multi-Wavelength Ellipsometers  :

A Film Sense Product :

MRS-European

Spring 2017  STRASBOURG France 

22-26 May 2017 Booth 75

Emrs stand

e mrs

EuroCVD 21 – Baltic ALD 15 Conference Linköping. Sweden, 11 – 14 June, 2017 
 
PhelmaALD
 

 for Thin Film fast SE Measurements

with the lowest price on the

market..

 ALDPhelma

 
 
 

PAWPRINTIn situ setup at Phelma (RAFALD Workshop 2015 Grenoble

aldcycle ALD tutorials

courtesy of Dr Deschanvres  and C. Vallee INPG LMG SIMAP UJF

Thicker layer ? The MProb series from SemiConSoft ... see next

petwithlayer

 

 

 

.click on picture to reach video demo for RT150

films

Scatterometry

GGratingScatterometry models for IC design CD data

More News..

Here will be  Future developpments...

EuV Projects

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Thick SiO2 on silicon substrate sample  Ellipsometry data ( Experiments : SE UV Ellipsometer at LETI . (unpublished 2008)

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