OpticNano Consulting

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OPTICNANO Consulting

126,route de St Donat

  38250 Lans en Vercors-France

Phone +33(0)970 44 82 71

mobile: +33(0)688701450

e-mail: info@opticnano.eu

Skype: opticnano

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earthWelcome  to the  Ellipsometry / Polarimetry site



A+ R A-

In situ real time film growth monitoring with your smart Phone...!!


Easy to handle even from your desktop and no computer need.. the FS-1 ellipsometer is a very compact  and light ( lees than 500 grams,  13x6x6 centimeters boxes, two heads source / detector small size boxes that  you only need to fix on your cluster tool deposition or growth system such as ALD, CVD  or film PVD cluster tools.  You will then follow in real time and be able to monitor your system from your office with  your tablet  or smartphone (windows or android or apple).. Easy mounting in most  optical windows designs without breaking vacuum.. and even here no workstation or PC laptop needed!!!

Such a light setting can be used as well on top of any other processing configuration  like Langmuir Blodgett , (LB)trough,  water surfactants controls, TIRE experiments or porosimetry , ect... and getting much more accuracy than usual instruments.

WP 20160302 16 45 29 Pro LI

To be followed  : Fs-1 with  an  IoT server with a low cost driver card server interface....

Optical Metrology


Surface &  Thin Film Characterization

 Ellipsometry Polarimetry Optical Instruments  

OPTICAL METROLOGY & POLARIMETRY for  Micro and Nano-Technology.

A Scientific Consulting and Expertise Service offered to customers.

We propose developments  & technology monitoring using metrology optics  for various applications   using Specroscopic Ellipsometry and Polarimetry.
Assistance can be established through contracts within a NDA protocol. The corresponding  interface is then setup between R&D laboratories and  the customer when Optical characterization is requested especially for thin films stackings (ultra  thin layers,  new materials, nanotechnology in line and off line).
Projects receive expert attention within this research environment  .This a way to consolidate optical models adapted to last innovative optical instruments such as Spectroscopic Ellipsometry and Polarimetry. This is our way of excellence to deliver



    • Assistance in the selection of proposals made by suppliers of instruments best suited to the needs of metrology research.


    • Optimization of data acquisition  from instruments


    • Support while  mounting European or Regional  financial programs by considering the feasibility and the relevance of a scientific project


  • Parallel education & training: seminars application or General instrumentation optics and the  applications.\r\n

    Our References

    More than 50 publications in Ellipsometrie Polarimetrie
    International  recognition , still Reviewer in various scientific journals TSF1, JOSA2 EJAP3.
    Within NDA interactions to protect the customer , various  possible exchange with different groups at a global level in Ellipsometry and reflectometry and Polarimetry: particularly with instrument suppliers  KLA Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra.

      • Participation in various industrial instrumentation projects (first spectroscopic ellipsometers in visible, infrared and extreme ultraviolet  ranges in France)
      • \r\n
      • Knowledge within NDA interactions with different groups at the global level Ellipsometrie and reflectometry Polarimetry: KLA Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra

    We have SKILLS for

      • Nanotechnology measurement  ex and in situ processing for new materials  with simulation programs
      • New Multi layers stackings and surface properties studies
      • Polarimetrie Photonic Structures and lithography
    Adsorption of surface porosimetrie studies.
The MProbe20
choice for another thickness range...




 The MProbe 20 series is a desktop system for thin-film thickness measurement. The measurement is based on spectroscopic reflectance and uses fiber optics retro-reflecting probe. This approach yields a compact, easy to use and affordable system.The system is user friendly and easy to setup – you will be ready to start measurements right away. Everything is included for samples measurement: spectrometer/ light source (main unit), fiber optics probe, sample stage, software, calibration/reference sample.Our extensive materials library has 500+ materials. New materials can be easily imported or created/added to the library. Support for a wide range of parameterized materials (from Cauchy to Tauc-Lorentz, etc.) is included.One-click measurement combines data acquisition and data analysis. Everybody is a measurement expert with MProbe!For advanced users, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. that can be used for advanced applications development.Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc.

Why use MProbe

Flexible: select the best hardware configuration for your application

Affordable: up to 50% savings as compared to other commercial instruments

Precision: unmatched precision <0.01nm or 0.01%

Materials database: extended database (500+ materials) is included

Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.

Integration: several integration options are available: Modbus TCP, OPC (DA 2.0/3.0), custom options

Technical support: application and technical support

Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings.

1nm-1000µm thickness range

Thin-film solar cells: aSi, CIGS, CdT, TCO

Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack)

Optical coatings (Anti-Reflection, Hard coatings, Filters)

Liquid Crystal displays (Cell Gaps, ITO, Polyamides)

Magnetic media, laser mirrors, thin metal films





GGratingScatterometry models for IC design CD data

More News..

Here will be  Future developpments...

EuV Projects


Thick SiO2 on silicon substrate sample  Ellipsometry data ( Experiments : SE UV Ellipsometer at LETI . (unpublished 2008)


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