OpticNano Consulting



logo OMPS


OPTICNANO Consulting

126,route de St Donat

  38250 Lans en Vercors-France

Phone +33(0)970 44 82 71

mobile: +33(0)688701450

e-mail: info@opticnano.eu

Skype: opticnano

Top Panel

 

earthWelcome  to the  Ellipsometry / Polarimetry site

from

OPTICNANO Consulting EURL

A+ R A-

Spectroscopic Ellipsometry (SE) can be used for structure change observations in thin, (less than 10nm) HfO2 layers deposited by p-MOCVD on silicon substrate. The absorption edge Eg and most of the critical point transitions in HfO2 are above 6 eV, which makes the extension to Deep UV SE (5 to 9 eV) very suitable. The layer thickness can be deduced from the visible transparency range (where k~0). As a contrary, in the UV, the weak penetration of light enables to use a direct inversion method for n and k. It is shown that when the HfO2 thickness decreases below 3 nm, the analytical Tauc-Lorentz (TL) or Cody Lorentz models are no more applicable. The phase mixture changes as function of thickness and deposition process temperature, deduced from SE correspond well to XRD and Angle Resolved (AR)-XPS spectroscopy observations. From the absorption spectra at 4.5 eV,  defects such as oxygen vacancies can be observed, whereas O/Hf ratio is estimated from XPS spectra. Deep UV SE reveals differences in the dielectric function with orthorhombic/monoclinic phase mixtures essentially with peaks at 7.5 and 8.5 eV. Quantum confinement originated from the grain size of the films and the excitonic origin of the 6 eV feature is discussed. see article here..

\r\n

 

 

\r\n

 

\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n
\r\n

logo OMPS

\r\n

nanocharm

\r\n
For a list of worshop in ellipsometry and events from the ellipsometry community  see here  But you will be asked to register also to NanoCharm.nanocharm

  
 18525063de

TM

\r\n

The information on this site is subject to a disclaimer and a copyright notice.All other content and data, including data entered into this Web site and informations added during and after the project development, are copyrighted by their respective copyright owners. Disclosure can be made only with their authorization. If you want to distribute, copy available documents, you have to do so under the terms of the corresponding law copyright and intellectual property of their authors.

\r\n\r\n\r\n\r\n ; Registration code (if you have it)\r\n ; Optional URL link when applet is "clicked".\r\n ; Reglink opened in new frame?\r\n ; Name of new frame for reglink\r\n; Statusbar message\r\n ; Image to load\r\n ; resolution (1 .. 8)\r\n ; Light effects ("YES" or "NO")\r\n ; Lowest light (-255 .. 255)\r\n ; Highest light (-255 .. 255)\r\n ; Auto design ("YES" or "NO")\r\n ; Density of fluid (2 .. 6)\r\n ; Number of fishes (0 .. 2)\r\n ; Cross effect ("YES" or "NO")\r\n ; Factor of cross effect\r\n ; Size of circular rain (0 = OFF)\r\n ; Circular rain factor\r\n ; Size of square rain (0 = OFF)\r\n ; Square rain factor\r\n ; Fixed drops ("YES" or "NO")\r\n ; X coord of fixed drops\r\n ; Y coord of fixed drops\r\n ; Size of fixed drops\r\n ; Factor of fixed drops\r\n ; Rain pressure (1 .. 2000)\r\n ; Fluidity ("water" or "oil")\r\n ; Interaction ("ON" .. "OFF")\r\n ; Optional image over applet\r\n ; Over image X offset\r\n ; Over image Y offset\r\n ; Memory deallocation delay\r\n ; Task priority (1..10)\r\n ; Min. milliseconds/frame for sync\r\nSorry, your browser doesn't support Java. ; Message for no java browsers.\r\n ; End of applet tag\r\n\r\n

Who'sOnline

We have 11 guests and no members online

Scatterometry

GGratingScatterometry models for IC design CD data

More News..

Here will be  Future developpments...

EuV Projects

\r\n

Thick SiO2 on silicon substrate sample  Ellipsometry data ( Experiments : SE UV Ellipsometer at LETI . (unpublished 2008)

Quick Access

Login Form

Remember Me

       

BT Content Slider

WebSites

Contatc us

Email:
Subject:
Message:

Bottom3

fferrieubottom3 texte.

Bottom4

ellipsometry 2bottom 4

OPTICNANO eurl

our location

Statistics

Users
3
Articles
109
Web Links
8
Articles View Hits
87745