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A versatile LED wide band Spectroscopic Ellipsometer

FS1Pic01The new Band Wavelength Ellipsometer (BWE) excels at measuring the thickness and index of transparent single films, in the thickness range from 0 to 1000 nm. Measurements on semitransparent and absorbing films, and 2 - 3 layer films are also possible.

 

Semiconductor: oxides and nitrides, high/low k dielectrics, amorphous and poly Si, photoresists Optical Coatings: high and low index films a-Si films, organic films (for OLED technology)

Data Storage industry: DLC films.Process R&D: in situ characterization of film deposition, for MBE, CVD,ALD, sputtering,

 Chemistry and Biology: detection of sub-monolayer material adsorption in-line monitoring and controlIndustrial

 Compact, light weight Can be installed without breaking chamber vacuum for

Realtime monitoring and control of film thickness

 

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Study growth dynamics, nucleation, interfaces Characterize Dep. Rates vs. process parameters in a single 0 50 100 150 200 250 300 350 400 run, without breaking vacuum!.

 

 

 

 

 

    For Europe Quotes and   Documentation ,  information

 

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