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A Way for Excellence in Optical Metrology


is a Scientific Consulting and Expertise Service offered to customers.

We propose developments  & technology monitoring using metrology optics  for various applications   using Specroscopic Ellipsometry and Polarimetry.
Assistance can be established through contracts within a NDA protocol. The corresponding  interface is then setup between R&D laboratories and  the customer when Optical characterization is required especially thin films requirements (layers thin, new materials, nanotechnology in line and off line).
Projects  will receive expert attention within this research environment of  SERMA Technologies and the LETI Laboratories. This is  unique environment potential offered in the MINATEC Pole.


SERMA organization enables  a complete panel of various characterization analyses (TEM, SIMS,..)
This a way to consolidate optical models adapted to last innovative optical instruments such as Spectroscopic Ellipsometry and Polarimetry. All of them are present in the Serma/ LETI clean room facility. This is our way of excellence to deliver

Expertise, contribution of experience and guidance on the possibilities for realization of measures to facilitate the implementation of an industrial project.

Assistance in the selection of proposals made by suppliers of instruments best suited to the needs of metrology research.

Optimization of data acquisition  from instruments

Support while  mounting European or Regional  financial programs by considering the feasibility and the relevance of a scientific project

Parallel education & training: seminars application or General instrumentation optics and the  applications.

Our References

More than 50 publications in Ellipsometrie Polarimetrie
International  recognition , still Reviewer in various scientific journals TSF1, JOSA2 EJAP3.

Within NDA interactions to protect the customer , various  possible exchange with different groups at a global level in Ellipsometry and reflectometry and Polarimetry: particularly with instrument suppliers  KLA Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra.


Participation in various industrial instrumentation projects (first spectroscopic ellipsometers in visible, infrared and extreme ultraviolet  ranges in France)
Knowledge within NDA interactions with different groups at the global level Ellipsometrie and reflectometry Polarimetry: KLA Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra

We have SKILLS for

Nanotechnology measurement  ex and in situ processing for new materials  with simulation programs
New Multi layers stackings and surface properties studies
Polarimetrie Photonic Structures and lithography
Adsorption of surface porosimetrie studies.

Serma Technologies



Serma Technologies


SERMA TECHNOLOGIES always manifest willingness to remain at a very top  technical level , listening  and following the  fast evolution of the technologies and the associated problems in order to provide expertise and advices at  a relevance level . Serma Technologies group developps metrology activities worldwide.

With the pleasure to meet you very soon inside our new building facility  inside  the MINATEC Pole.minatec logo


Please note our laboratories adress in Grenoble now:SERMA TECHNOLOGIES
BHT- Bâtiment 52
7, Parvis Louis Néel-BP50
38040 Grenoble Cedex 9 France


Tel : +33. (0)