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Polarimetry of Surfaces (1)

  • Partenariat d’etudes et projets instrumentation avec plusieurs équipementiers ( jyh, sopra, kla tencor).premier développements de l’ellipsometrie spectroscopique visible et dans l’infra rouge
  • IBM (t.j.watson research center p.o. box 218 yorktownsheight .y. 10598 -USA ). position postdoctorale (1978-1979.) (2-d paramagnet lb materials with m.pomerantz)
  • Commissariat Energie Atomique (cea) france centre d'etudes nucleaires de grenoble .drf département recherches fondamentales .thèse doctorat d'etat 1975/1978. french state phd thesis doctoral period. magnetism nuclear realaxation overhauser effect)
    univercidad nacional de ingenieria (u l ) casilla 1301 lima peru. (cooperation enseignement, (mecanique quantique), et directeur de thèse département de physique mai 1974/aout75))
    cea france –drf (département recherches fondamentales (drf) magnetic resonance laboratory (research works in solid state physic 3rd post university level university thesis 1971 1974 . post university formation
    summer job 1970 . analytical chemistry mass spectrometry he in quartz diffusioncea.
  • UNIVERSITY
    thèse doctorat d’état physique des solides 1978
    thèse 3eme cycle résonance magnétique (juin 1972).grenoble université.
    diplôme d'études approfondies (dea) physique de l’etat solide 1971 .
    maitrise de sciences (1970) grenoble université.
    PERSONAL DATA
    Birth Date  05 10 1947 Grenoble (France)
    French citizenship  service coopération (pérou lima).
    Conseiller municipal ville de corenc (isere)
    anglais, italien espagnol courant allemand scolaire
  • Previous activities

    STmicroelectronics (depuis 2000): r\& d in optical characterization senior expert vuv ellipsometry mueller matrix polarimetry scatterometryr mueller polarimetry ( responsable du projet au leti).
    CNET,cns france telecom (r\&d ).
    thin films /optical characterization instruments (ellipsometry (visible and infra red)and reflectometry.
    laser induced temperature modelisation(1984-87)
    ionic implantation (1980-1984).code montecarlo
    partenariat d’etudes et projets instrumentation avec plusieurs équipementiers ( jyh, sopra, kla tencor).premier développements de l’ellipsometrie spectroscopique visible et dans l’infra rouge
    IBM (T.J.Watson research center p.o. box 218 yorktownsheight .y. 10598 -usa ). position postdoctorale (1978-1979.) (2-d paramagnet lb materials with M. Pomerantz)
    Commissariat énergie atomique (cea) France centre d'etudes nucleaires de grenoble .drf département recherches fondamentales .thèse doctorat d'etat 1975/1978. french state phd thesis doctoral period. magnetism nuclear realaxation overhauser effect).
    Univercidad nacional de ingenieria (u l ) casilla 1301 lima peru. (cooperation enseignement, (mecanique quantique), et directeur de thèse département de physique mai 1974/aout75))
    CEA Fance –DRF (département recherches fondamentales (drf) magnetic resonance laboratory (research works in solid state physic 3rd post university level university thesis 1971 1974 . post university formation
    summer job 1970 . analytical chemistry mass spectrometry he in quartz diffusioncea.

cursus universitaire

thèse doctorat d’état physique des solides 1978 PHD
thèse 3eme cycle résonance magnétique (juin 1972).grenoble université.
D.E.A. diplôme d'études approfondies (dea) physique de l’etat solide 1971 .
maitrise de sciences (1970)Grenoble université.

données personnelles
date de naissance 05 10 1947 grenoble (france)
citoyenneté française service coopération (pérou lima).
ancien conseiller municipal ville de corenc (isere)
anglais, italien  courant, espagnol, allemand

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SNOWRAY
SNOWRAY: A very nice step into future for industry quality control
From what we learned before...
Even though being far away...
Meta materials.. Polarimetry Mueller matrices Surface Analysis but what else??
e.g. with the Film Sense powerfull Instrument ... the RT300 from Film Sense 60seconds for only 49 points
or slower with other systems...
classical Mapping obtained with XY SE Mapping...2D acquisition takes a very long time isn't? Even with only 49 points
with 3D results SNOWRAY looks like that : Immediate picture!!! .If you get many data...
Is that a new way? ...Let's consider Plank 's law and Material Emissivity
Irradiated multi layers sample gives a unique signature
In the Infra Red related to respective material nature and respective layers stacks thicknesses
the IR Emissivity versus thickness can be thus calibrated.....provide then absolute thickness values..
with the SNOWRAY technique .. that's what we get
another wafer patented mapping technique
instantaneous measurement.compareto classical XY mapping..!!
A deep into wafer structure
with powerfull analysis since..for one detail..
One can focus on specific 3D defects detected ...
when setup with In situ Ellipsometer with very fast acquisition rate (10ms)...
Collaboration in Beta sites is opened worlwide ...
A new instrument a full real time thickness calibration .

IR Basics Emissivity Instruments

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