Experiences

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ellipsometers
thats an old one
wifi control
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Polarimetry of Surfaces (1)

OPTN


Easy to handle even from your desktop and no computer need.. the FS-1 ellipsometer is a very compact  and light ( lees than 500 grams,  13x6x6 centimeters boxes, two heads source / detector small size boxes that  you only need to fix on your cluster tool deposition or growth system such as ALD, CVD  or film PVD cluster tools.  You will then follow in real time and be able to monitor your system from your office with  your tablet  or smartphone (windows or android or apple).. Easy mounting in most  optical windows designs without breaking vacuum.. and even here no workstation or PC laptop needed!!!

Such a light setting can be used as well on top of any other processing configuration  like Langmuir Blodgett , (LB)trough,  water surfactants controls, TIRE experiments or porosimetry , ect... and getting much more accuracy than usual instruments.

 

FS4smart

 

 

 

Fs-1 with  an  IoT server with a low cost driver card server interface....


PhelmaALD

 Multi-Wavelength Ellipsometers  :

Conferences :

 Thank you for visiting our Booth OPTICNANO at E_Mrs Strasbourg. and  during RAFALD 2017 (Paris & Montpellier (nov 2017).

I have been very pleased to discuss with you on your projects. We spoke also together to the right opportunity and what the

choice of an in situ FS-1 ellipsometer could bring to you  providing  fast real time monitoring control.

 

MRS-European

Spring 2017  STRASBOURG France 

22-26 May 2017 Booth 75

e mrs

 

Emrs standEmrs stand sphoto groupe rafald2017      RAFALD Workshop 2017 Montpellier France                                       

e mrs

EuroCVD 21 – Baltic ALD 15 Conference Linköping. Sweden, 11 – 14 June, 2017 
PhelmaALD
 

 for Thin Film fast SE Measurements

  with the lowest price on the
   market..
ALDPhelma aldcycle

 

In situ setup at Phelma (RAFALD Workshop 2015 Grenoble

 ALD tutorials

courtesy of Dr Deschanvres  and C. Vallee INPG LMG SIMAP UJF

Thicker layer ? The MProb series from SemiConSoft ... see next

petwithlayerPAWPRINT

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SNOWRAY
SNOWRAY: A very nice step into future for industry quality control
From what we learned before...
Even though being far away...
Meta materials.. Polarimetry Mueller matrices Surface Analysis but what else??
e.g. with the Film Sense powerfull Instrument ... the RT300 from Film Sense 60seconds for only 49 points
or slower with other systems...
classical Mapping obtained with XY SE Mapping...2D acquisition takes a very long time isn't? Even with only 49 points
with 3D results SNOWRAY looks like that : Immediate picture!!! .If you get many data...
Is that a new way? ...Let's consider Plank 's law and Material Emissivity
Irradiated multi layers sample gives a unique signature
In the Infra Red related to respective material nature and respective layers stacks thicknesses
the IR Emissivity versus thickness can be thus calibrated.....provide then absolute thickness values..
with the SNOWRAY technique .. that's what we get
another wafer patented mapping technique
instantaneous measurement.compareto classical XY mapping..!!
A deep into wafer structure
with powerfull analysis since..for one detail..
One can focus on specific 3D defects detected ...
when setup with In situ Ellipsometer with very fast acquisition rate (10ms)...
Collaboration in Beta sites is opened worlwide ...
A new instrument a full real time thickness calibration .

IR Basics Emissivity Instruments

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