The MProbe 20 Series: Thin Film Thickness Measurement and more
Experiences
OSA Reviewer
The MProbe 20 series is a desktop system for thin-film thickness measurement. The measurement is based on spectroscopic reflectance and uses fiber optics retro-reflecting probe. This approach yields a compact, easy to use and affordable system.
The system is user friendly and easy to setup – you will be ready to start measurements right away. Everything is included for samples measurement: spectrometer/ light source (main unit), fiber optics probe, sample stage, software, calibration/reference sample.
Our extensive materials library has 500+ materials. New materials can be easily imported or created/added to the library. Support for a wide range of parameterized materials (from Cauchy to Tauc-Lorentz, etc.) is included.
One-click measurement combines data acquisition and data analysis. Everybody is a measurement expert with MProbe!
For advanced users, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. that can be used for advanced applications development
Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications e.g. chemical concentration (we have a range of flow cells), filters and coating testing, etc.
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Why use MProbe
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Applications
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Flexible: select the best hardware configuration for your application Affordable: up to 50% savings as compared to other commercial instruments Precision: unmatched precision <0.01nm or 0.01% Materials database: extended database (500+ materials) is included Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc. Integration: several integration options are available: Modbus TCP, OPC (DA 2.0/3.0), custom options Technical support: application and technical support |
Practically any translucent or low-absorbing film can be measured: SiO2, SiNx, DLC, Photoresist, Polymer, Polyamide, polySi, nanocrystalline Si, aSi, Si, Parylene, industrial coatings. 1nm-1000µm thickness range Thin-film solar cells: aSi, CIGS, CdT, TCO Semiconductor and dielectric materials (Photoresist, oxides, nitrides, OLED stack) Optical coatings (Anti-Reflection, Hard coatings, Filters) Liquid Crystal displays (Cell Gaps, ITO, Polyamides) Magnetic media, laser mirrors, thin metal films |
What’s in the box?
- Main unit (includes spectrometer(s), light source, electronics)
- Reflectance probe
- Sample table with reflectance probe holder
- TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB memory stick )
- Calibration set: reference wafer (Si or Al depending on the model, or/and Quartz plate (optional)) and black absorber/pad
- Test sample- 200nm oxide wafer
- USB cable (connecting main unit to computer)
- Universal power adapter (110V/220V)
In addition, MProbe includes the following Semiconsoft advantages:
- Library with over 500 materials and support for parameterized materials
- 12 months of free software updates and application support
- Hardware upgrade program
System model can be selected based on the required thickness and/or wavelength range.Custom configurations that combine features of different models are available on request. Please let us know your application and we will offer a solution
| Precision | Accuracy | Stability | Spot Size | Sample Size | |
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| 0.1Å or 0.01% (greater of) | 0.2% or 10A (greater of) | stability 0.2A or 0.02% (greater of) | 2mm standard (optional to 20µm) | from 4mm | |
| s.d. of 100 thickness reading of 100nm SiO2/Si calibration sample | filmstack dependent | 2 sigma over 20 days (100 measurements daily) on 100nm/Si calibration sample |
| Model | Wavelength range(nm) | Spectrometer/Detector | Lightsource | Thickness | |
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| Vis | 400-1100 | Spectrometer F4/Si CCD 3600 pixels/ ADC- 16 bit | Tungsten-Halogen | 15nm- 75µm | Vis Brochure |
| UVVisSR | 200-1100 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit | Deuterium/Tungsten-Halogen | 1nm-75µm | UVVis Brochure |
| HRVis | 700-1000 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit /resolution | Tungsten-Halogen | 1µm-400µm | |
| UVVis-RT | 200-1000 | F4/Si CCD 2048 pixels/ ADC 16 bit/Optical Switch(Reflectance & Transmittance) | Tungsten-Halogen | 1nm-75µm | UVVisRT Brochure |
| NIR | 900-1700 | F2 Spectrometer InGaAs CCD 512 pixels: ADC- 16 bit | Tungsten-Halogen | 50nm- 85µm | NIR Brochure |
| VisNIR | 400-1700 | Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and F2 InGaAs 512 pixels PDA) /ADC- 16 bit | Tungsten-Halogen | 10nm- 85µm | |
| UVVis-NIR | 200-1700 | Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and InGaAs 512)/ ADC – 16 bit | Deuterium/Tungsten-Halogen | 1nm-85µm | |
| VisXT | 800-870 | F4 spectrometer/Si 2048 pixels CCD | Tungsten-Halogen | 10µm-1400 µm | |
To learn more, download the following brochures:
Download MProbe 20 brochure
Download MProbe UVVisSR brochure
Download MProbe Vis brochure
Download MProbe UVVis-RT brochure
Download MProbe NIR brochure
Download the MProbe Measurement 101
Download the MProbe Mapping Option
SemiconSoft, Inc.
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